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Axcelis Technologies, Inc.

ACLS

Filing: SEC 10-Q
Period: Three months ended March 31, 2026
Basis: Editorial filing; Read original SEC 10-Q ↗

Sankey diagram of Axcelis Technologies, Inc.. A complete text table follows the diagram.

Axcelis Semiconductor Equipment Revenue Flow

Ion implantation products lead a semiconductor-equipment business, with services alongside them.

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Source & review

Read original SEC 10-Q ↗

SEC accession: 0001104659-26-057725
Filed: Date not recorded
Reviewed: Date not recorded
Status: Individual filing review complete

How to read these figures

Labels and displayed flow values are reported filing values or exact disclosed subtotals.

Labels and narrative explain the filing. A category marked “arithmetic bridge” or “residual” is calculated from reported totals, rather than a separately reported line.

Axcelis reports $198.956M of total revenue, with product and services revenue disclosed in the filing.

View accessible tables

Financial categories · Three months ended March 31, 2026 · Millions of USD
Category	Stage	Value	Notes
Axcelis Technologies revenue	1	$199M	$198.956M reported quarterly revenue
Semiconductor equipment products	2	$183M	Reported product revenue
Services	2	$10.9M	Reported services revenue
Revenue reconciliation	2	$5.2M	Residual to reported total

Financial flows · Millions of USD
From	To	Value
Axcelis Technologies revenue	Semiconductor equipment products	$183M
Axcelis Technologies revenue	Services	$10.9M
Axcelis Technologies revenue	Revenue reconciliation	$5.2M